4, Building 5, Lane 4922, Moscow, Zelenograd,
"ОАО "ELMA" building, 124460, Russia

Tel/Fax: +7 (495) 988-8394

E-mail: info@esto-el.ru

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ELI-18/200

The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.

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ООО "ESTO-EL" Ltd performs the whole set of operations for creation of novel inverter-type power supplies designed to ensure the operation of technological devices and to conduct technological procedures, which are mainly used in vacuum equipment for thin film deposition.
In other words, they are used for various types of ion sources, magnetron sputtering systems, arc evaporators as well as plasma processing of the glow discharge type, deposition of organosilicon, ensuring electric potential bias, etc.

ESTO-EL production

OOO “ESTO-EL” Ltd production comprises either single Inverters (including multifunctional Inverters with integrated arc protecting/frequency generate Switches or other additional supply/control devices) or Complete Sets, including an Inverter and a remote Switch or 2-4 Inverters (one of which is Master) and a remote Switch.
The Inverters are powered by high-performance IGBT or IGBT modules (IRF, Semikron), which possess high frequency inversion (35-50 kHz) of supply voltage and, consequently, fast response of overload and short circuit load protection as well as low stored energy and output voltage ripple.

Inverters are unified with a single control panel, self-diagnostics and alarm tools, common for the Inverters of the same series. They have full and galvanically isolated from internal control circuits, standard analog-digital or network (RS-485) interfaces for communication with external PLC-controller, galvanic isolation of the powered part as well as + and – outputs of the case, input supply and other circuits of the device.

The Invertors are capable of continuous duty at shorts or no-load modes. The devices are high-efficiency and possess low weight-dimensional specifications as well as high reliability. Their static volt-ampere characteristics are optimal for different technological instruments.

Arc protecting/frequency generator Switches – are the main option of Invertors and Complete Sets for magnetrons and electric bias. Integrated (up to 9kW) and remote (above 18kW) Switches ensure undeniable advantages in complicate technological procedures (oxides, nitrides, ceramics or dielectrics deposition) at the expense of ultra-fast response to emergence and liquidation of conditions favourable to occurrence of micro arcs. The remote Switches are divided into unipolar (ELS series) and dual (ELSD series) depending on their functional purpose. They are included into the bias power supply Complete Sets and unipolar magnetron sputtering systems or dual magnetron systems correspondingly.

Operational benefit of the Switches usage lies in prevention of emerging "micro arcs" escalation into separate micro arcs, and removal of the possibilities for the emergence of "micro arcs" at the expense of short interruptions (pauses) in voltage supply from the power source to the load. As a consequence, the processes are stable and defectless.
OOO ESTO-EL Ltd. manufactures hermetic water-cooled remote Switches fixed in plastic cases.

Among other embedded options, which are included in OOO ESTO-EL Ltd. equipment, there are standalone discharge ignition units of the inverters for magnetron sputtering systems, power supply units for compensators of some ion source Inverters, powered Switches and ignition units of the inverters for arc evaporators and others...

 

  

News
01.04.2010
ELI-18/200

The manufacturing of a new multifunctional ion source Inverter of ELI-18/200 type for electric supply of “End Hall” ion sources has been started. In addition to the power supply of main discharge, it has “smart” control system for neutralizer emission, reserve neutralizer control and a double-channel gas flow control subsystem.


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OOO "ESTO-EL" Ltd. production undergoes long-term and severe tests, simulating their work in the real conditions (including continuous duty at S/C or at idle mode or operation in conditions of 100 micro arc per second).

Constant "feedback" and prompt response to the comments of our customers is provided.
OOO "ESTO-EL" Ltd. has performed and is willing to go on carrying out the developments, similar to the abovementioned, which are not directly related to the "main activities" of the company.

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