ELI series.
This series is designed to supply electric power to ion sources, which are used for ion-plasma deposition and etching of thin film coatings in vacuum, for ion surface cleaning of products and for ion assisting. The units with output voltage up to 300V and capacity up to 4kW are intended for low-voltage ion sources of "End Hall" type. The units with output voltage up to 4kV and capacity up to 9kW are intended for high-voltage round and for extended ion sources of "Radical" type.
Model |
Max. Output parameters |
Case type: |
Note: |
Download |
|
Voltage, V |
Current, A |
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"End Hall" type: |
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"ELI-18/200 (-R)" |
+/- 200(550) |
20 |
19", 4HU |
4 kW, neutr. (+backup) 25V, 30A, Iem/Idischarge, double-channel gas puffing control subsystem |
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Universal Automated Signalization type (extended): |
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"ELI-0,4(0,6)/ |
+3000 |
0,4(0,6) |
19", 4HU |
1.2 (1.8) kW, âîçì.ñòóï. volt-ampere characteristic, options: |
|
"ELI-1,3/3000 (-R)" |
+3000 |
1,5 |
19", 4HU |
4 kW, âîçì. 2-stage. volt-ampere characteristic, options |
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"ELI-2/3000 (-R)" |
+3000 |
2,0 |
19", 4HU |
6 kW, âîçì. 2-stage. volt-ampere characteristic, options |
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"ELI-3/3000 (-R)" |
+3000 |
3,0 |
19", 4HU |
9 kW, âîçì. 2-stage. volt-ampere characteristic, options |